Abstract— Lumetrics has developed a fixture that expands precision measurement capabilities of the commercialized low-coherence interferometer, OptiGauge II, to materials that are not translucent to its measurement beam light of 1310nm. The fixture contains two probes oriented towards each other and an optical reference surface. The effects of the temperature on the measurement accuracy are eliminated via a calibration procedure conducted before the measurement.


Thickness Measurement of Opaque Materials Using Interferometry Download