Optical thickness and flatness measurement of bonded silicon wafer assemblies

Application Note:

Lumetrics is the market leader in providing high-precision, non-contact optical thickness measurements to medical, scientific, and ophthalmic industries. A unique capability of our flagship thickness measurement device, OptiGauge II, is its ability to measure the individual layer thickness of a multiple-layer sample. The OptiGauge II measures using a 1310nm wavelength. This is an ideal wavelength for measuring through nearly all visually transparent and semi-transparent objects. A visually opaque material that is highly transmissive at 1310nm is silicon. This makes silicon an ideal sample for optical thickness measurement.

Optical Thickness and Flatness Measurement App Note Download