Abstract—Lumetrics, Inc. (Rochester, NY) has made inspection of internal dimensions of microfluidic flow cells possible with low-coherence white light interferometry. The OptiGauge II can measure internal channel heights down to 12 microns with 100 nanometer precision quickly and non-destructively. Machine vision-aided inspection stations can quantify other critical dimensions of entire production runs, ensuring higher product quality and that the performance specifications are met.

Microfluidic Flow Cells Application Note Download